---

AMETEK Develops Oxygen Analyzer Specifically For Rapid Thermal Processing (RTP) Wafer Fabrication

23 August 2000

AMETEK Develops Oxygen Analyzer Specifically For Rapid Thermal Processing (RTP) Wafer Fabrication

     Dycor(R) Analyzer Improves Yields by Detecting Oxygen Contamination

    PAOLI, Pa., Aug. 23 AMETEK, Inc. developed its new
Dycor(R)CG1100-RTP oxygen analyzer specifically for the semiconductor
industry's latest Rapid Thermal Processing (RTP) silicon wafer fabrication
systems.  The world market for RTP wafer fabrication systems currently exceeds
$200 million per year and is expected to total more than $600 million by 2003.
    "By applying demand-flow manufacturing technology, AMETEK designed and
delivered the first of its new CG1100-RTP analyzers to a leading manufacturer
of RTP systems in less than six months.  The analyzer improves processing
yields by detecting oxygen contamination at the parts-per-million level and
maximizes throughput by ending the purge cycle as soon as the oxygen
background is at an acceptable level," commented Tom Mangold, President -
Process and Industrial Products for AMETEK's Electronic Instruments Group.
    Rapid Thermal Processing uses very rapid heating cycles to perform high-
temperature processes traditionally done by slower-heating batch furnace
technologies.  The technology is especially suited for both 200mm and 300mm
wafers with reduced feature size that require advanced oxygen detection and
control to ensure uniform and repeatable processing.
    "The ultimate goal of Rapid Thermal Processing is higher through-put and
lower operating costs.  However, the advantages of Rapid Thermal Processing
and fast ramp mini-batch furnaces can be negated if there isn't positive
protection from the effects of oxygen contamination," noted Mr. Mangold.
    The CG1100-RTP oxygen analyzer is one of a growing range of products
offered by AMETEK for the semiconductor industry.  These products include
ultrahigh-purity transducers and trace moisture analyzers that measure the
pressure, quality and content of specialty gases used by the semiconductor
industry.
    AMETEK, Inc. is a New York Stock Exchange-listed company and a
leading global manufacturer of electronic instruments and electric motors.

    CONTACT:  Jim McKinley of AMETEK, 610-889-5234.