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Plasma-Therm, Inc. Announces Sale of Shuttlelock(R) ICP for Development of MEMS Automotive Sensors

21 July 1998

Plasma-Therm, Inc. Announces Sale of Shuttlelock(R) ICP for Development of MEMS Automotive Sensors

    ST. PETERSBURG, Fla., July 21 -- Plasma-Therm, Inc.
announced today the sale of a Shuttlelock(R) 770 plasma
processing system to a prestigious automotive corporate research center,
located in the United States, for use in the development of advanced
MicroElectroMechanical (MEMS) sensors.  The system incorporates Plasma-Therm's
Inductively Coupled Plasma (ICP) technology and will be used for process
development and sensor prototyping activities.  Deep silicon etch technology,
licensed from Robert Bosch GmbH, will be used in the system.
    Dr. Jay Sasserath, the Company's Vice President, Strategic Marketing,
stated, "Automotive applications represent the largest market segment for MEMS
technology.  Airbag sensors are the most well known application for automotive
MEMS devices at this time.  However, other MEMS-based sensors are expected to
be integrated into automobiles in the future, including gyroscopes for
advanced braking and control systems, accelerometers in a number of mechanical
subsystems, and sensors for measuring real-time engine performance.  This
Shuttlelock(R) will be used in the development of all of these devices."
    Dr. Sasserath added, "Bosch deep silicon etching is the enabling
technology for the MEMS sensor manufacturer.  Its use allows for fabrication
of high performance sensors, which can be constructed in a very small area.
Both of these results are needed by automotive sensor manufacturers because of
cost, physical size and performance requirements."
    The statements contained in this release which are not historical facts
may be deemed to contain forward-looking statements with respect to events,
the occurrence of which involve risks and uncertainties, including without
limitation, demand and competition for the Company's services and products and
other risks or uncertainties detailed in the Company's Securities and Exchange
Commission filings.
    Plasma-Therm Inc., headquartered in St. Petersburg, Florida, is a leading
producer of plasma process equipment primarily used by manufacturers requiring
expertise in thin film etching and deposition.  More information about PTI may
be obtained by visiting our website at http://www.plasmatherm.com .