Unaxis Unveils New Production Solution Enabling 45nm Photomask Etching & Beyond

ST. PETERSBURG, Fla.--April 18, 2006--Unaxis Wafer Processing, a global leader in deposition and etch solutions, announced today their latest technology breakthrough allowing device manufacturers to descend to the 45nm technology node and beyond! Unaxis' new production solution - a true fifth generation dry etch tool - continues to set the worldwide standard for advanced dry etch fabrication by addressing the biggest challenges faced by mask makers today. The latest process innovations demonstrate sub-3nm CD uniformity in Cr etch and 2 degree phase uniformity for advanced Quartz mask - enabling the manufacture of 45nm photomasks.

With the semiconductor industry technology roadmap (ITRS) continuing to contract, the design of the MASK ETCHER V(TM) tool demonstrates micro-lithography and ultra-high resolution mask making are key success factors for the future of semiconductors. The Mask Etcher V(TM) platform provides enhanced ICP process solutions over previous systems, including improved particle control, ultra-low CD etch bias and sub-7nm feature-size linearity.

"Unaxis is one of the companies leading the charge to 45 nm and below," states Dr. Peter Podesser, President of Unaxis Wafer Processing. He continues, "In this nano era, Unaxis prides itself in providing customers with more than just a hardware solution. The Mask Etcher V(TM) combines all the right process technologies with material solutions providing cost-effective, viable options to address constantly evolving market dynamics."

About Unaxis Wafer Processing

Unaxis Wafer Processing offers innovative production solutions for deposition and etch. These solutions allow production of leading edge chips, devices and components used in PCs, telecommunication and the automotive industry. Close cooperation with key customers and suppliers allows Unaxis to stay at the forefront of technology.

Unaxis Wafer Processing has developed a leading market position in each of its served markets which include: Advanced Packaging, Thin Wafer and Multi-Level Metallization, Photomask Etching and Compound Semi, MEMS and Nanotechnology. The Company has a worldwide infrastructure, providing customer support and training through two technology centers and over 40 sales, service and spare parts centers.

Unaxis Wafer Processing is a Division of Unaxis (SWX: UNAX), a globally leading company in the field of thin film, vacuum and precision technology. Based on these core competencies, Unaxis develops production systems, components, and services for high-technology products. The company's commercial activities center on Coating Services, Vacuum Solutions, Data Storage Solutions, Optics, Space Technology, as well as production equipment for Solar modules. Unaxis also applies its core competencies as a major provider of semiconductor technology. Unaxis currently employs approximately 6 500 personnel and, in its 2005 financial year, recorded sales of CHF 1 605 billion.