Surface Technology Systems Wins Order From Bosch for New Pegasus Deep Reactive Ion Etch (DRIE) System

NEWPORT, Wales, Aug. 18, 2005 -- Surface Technology Systems plc (STS) , a leader in plasma process technologies for the growing MEMS and related markets, today announced that it has received an order for its new Pegasus Deep Reactive Ion Etch system from leading automotive MEMS device manufacturer, Robert Bosch GmbH. The order from Bosch strengthens STS' long-standing relationship with the German company, and is the fifth such order since Pegasus was launched on June 28, 2005.

The Pegasus system will be installed at Bosch's MEMS wafer fab in Reutlingen, Germany. It will be utilised in a number of research and development projects to develop new MEMS devices.

The flexibility of the STS software with direct manual control of the system enables manufacturers such as Bosch to fully optimize their individual processes, ensuring product quality and high yield. In the MEMS market, where device designs often differ significantly from one manufacturer to another, STS believes its equipment has the capability to meet the demands of a wide range of customers -- from 'blue-sky' researchers to high volume manufacturers such as Bosch.

In addition to the process advantages offered by the Pegasus technology, a key factor in gaining this latest order from Bosch was STS' commitment to providing outstanding customer support and service within the German territory. Earlier this year STS strengthened its team at the German Sales Office in Ulm with the recent appointment of a Regional Customer Support Manager, who will work closely with customers in the region.

"The order from Bosch for the Pegasus system is significant news for STS," said Mutsuo Mukuda, Vice Chairman of STS. "Not only have we placed Pegasus with one of our largest and most prestigious European clients, but the sale also reinforces the belief that we have in Pegasus. The range of enhancements and developments that Pegasus brings to the MEMS market, such as the high uniformity plasma source, result in higher etch rates and improved etch uniformity, leading to higher throughput and device yield. We fully expect Pegasus to gain further traction in the MEMS market."

About Surface Technology Systems plc

STS designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non 'mainstream' semiconductor devices. STS serves a range of applications in several emerging sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.

STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 800 systems. For more information about STS and the Pegasus DRIE system please see http://www.stsystems.com/

About Robert Bosch GmbH

Bosch is a leading global supplier of automotive and industrial technology and of consumer goods and building technology, and the world's largest manufacturer of MEMS. In 2004, total sales of the Bosch Group came to 40 billion euros. 72 percent of these sales were generated outside Germany.

To remain at the leading edge of technology and to continue to grow, Bosch invests heavily in research and development every year. R&D expenditure in 2004 was 2.9 billion euros, or 7.2 per cent of sales. At 2.4 billion euros or 9.4 percent of sales, automotive technology is the most research-intensive business sector. The company's technological competence is also manifested in the number of its patent applications: With some 2,800 inventions, Bosch is the second-largest patent applicant in Germany. In terms of the number of patents, Bosch leads the field in automotive technology. For more information about Bosch, please see http://www.bosch.com/