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Nikon's SITECH Group Introduces New Wafer Inspection System To Meet 90nm Technology Requirements

The AMI-3000 Provides Automated, Precise and Rapid Inspections

MELVILLE, N.Y., August 6 -- Nikon's Semiconductor Inspection Technologies Group (SITECH) today announced the introduction of the AMI-3000 wafer inspection system, the first of a new generation of wafer inspection systems designed to meet the automated 300mm wafer production in the 90nm technology node and beyond.

Designed primarily to address after-develop inspection, the AMI-3000 can also be adapted to serve nearly all post-process inspection steps within a fab. Its automated macroscopic wafer inspection unit features a unique wafer imaging system that captures the entire wafer surface area and achieves an extraordinary throughput of more than 150 wafers per hour. Built to provide extremely rapid and accurate inspections, the AMI-3000 is fully capable of screening 100 percent of the post-litho product flow, significantly improving yield performances. Additionally, the AMI employs a new filtering technology, which can omit previous layer pattern interference thus imaging only the patterned top layer for inspection.

The AMI-3000 delivers efficiency and confidence to an otherwise subjective, human-intensive visual inspection procedure. As the industry progresses towards the 90nm technology nodes and inspection demands go beyond the ability of human sight, the AMI-3000 can automate this visual inspection step by utilizing its specially designed diffractive and scattering optics, eliminating the subjectivity and margin of error that comes with human inspection.

"The requirements for automated wafer inspection are increasingly demanding. As IC designs exceed the 90nm technology node, visual inspections become less and less feasible in a fab environment due to the diminishing diffraction angles from the tightly packed lines and spaces," noted Wayne Lam, US application engineer of Nikon's SITECH. "Nikon is committed to offering the best possible solution to automated macro inspection solutions to the industry. Utilizing our expertise in advanced technologies, the AMI-3000 overcomes the limitations that can arise with human visual inspection."

The AMI-3000 is also supported with tested and proven automated defect identification and categorization software tools. An optional backside and edge defect detection modules are also available for purchase to compliment the system.

About Nikon Instruments Inc.

Nikon Instruments Inc., world leader in microscope and advanced digital imaging technology, is committed to providing its customers with quality products for bioscience research and industrial applications; high-performance semiconductor wafer handling and inspection equipment; and advanced high-speed, vision-based and optical measuring tools. For more information, visit the Nikon Web site at www.nikonusa.com. Product related inquiries can be directed to Nikon Instruments at 800-52-NIKON.