Nikon Introduces Addition of Z120X Maximum Magnification Module to NEXIV Series of Advanced Measuring Systems

High Precision System Delivers More Powerful Detection And Accuracy for Critical Dimensions

MELVILLE, N.Y., Aug. 5 -- Nikon Instruments Inc., a world leader in microscope and advanced digital imaging technology, today announced the introduction of the powerful VMR-Z120X Maximum Magnification Module to the entire family of NEXIV VMR series measuring tools, including the newly released VMR-H3030 master laboratory model. The new Z120X module adds an even greater magnification range for accuracy, versatility and edge detection, as well as greater optical capabilities to the leading NEXIV systems.

The VMR-Z120X provides superior measuring capability with a dual optical system producing magnifications from 36X up to 4320X, enabling imaging and measurements of part features down to 1 um (micrometer). Inspections of complex designs are greatly improved with Nexiv's new combination of optics, as well as the already successful intelligent search software and TTL laser scanning. The module precisely measures a wide variety of applications ranging from semiconductor wafers to interconnect's mechanical geometric features. The 120 X Telecentric Zoom System enables high throughput precise measurements of heights, complex profiles and critical dimensions.

The new Maximum Magnification Module offers as a standard feature an improved through-the-lens (TTL) laser auto focus for on-axis high-speed spot focusing and surface scanning. The instrument utilizes the powerful lens system to deliver a tightly focused laser spot for high throughput, ultra-high precision, and allows the user to scan parts at 1,000 points per second on complex 3-D profiles.

The NEXIV VMR system's user-friendly software features interactive measurement wizards, which can be customized by each operator for future use. Intelligent search functions eliminate possible measurement errors and a multi-pattern search function automatically corrects part-to-part variation along with deviations in expected edge or feature locations. NEXIV also features a pattern matching measurement system that determines coordinate values for features too difficult to measure in the normal geometric measuring mode.

About Nikon Instruments Inc.

Nikon Instruments Inc. continues to provide world class solutions in microscope and advanced digital imaging technology, and is committed to providing its customers with quality products for bioscience research and industrial applications; high-performance semiconductor wafer handling and inspection equipment; and advanced high-speed, vision-based and optical measuring tools. For more information, visit the Nikon Web site at www.nikonusa.com and www.nexiv.net. Product related inquiries can be directed to Nikon Instruments at 800-52-NIKON.