Mykrolis Introduces New Fluorogard RS Cartridge and Disposable Filters at SEMICON West
BILLERICA, Mass.--July 14, 2003--Mykrolis Corporation , a leading supplier of components and subsystems to the semiconductor industry, today introduced its new line of Fluorogard(R) RS cartridge and disposable filters at the SEMICON West trade show (Booth #726) in San Francisco from July 14-16, 2003. Mykrolis's Fluorogard RS filters provide ultimate protection from films, gels, and hard-particle contaminants produced by photoresist-stripping and residue-removal applications used in the semiconductor manufacturing process.
Fluorogard RS filters are designed to last two to three times longer than existing filters, for a lower cost of ownership. The filters are available in a variety of retention ratings (0.05, 0.1 and 0.2 micron) and in the following configurations:
-- Fluorogard P-RS (Pre-Resist Stripping) - PTFE pre-filter used
with the Fluorogard RS-T in non-ashing photoresist stripping
-- Fluorogard RS-M (Resist Stripping Multi-membrane) - compact
PTFE pre-filter/membrane filter combination for non-ashing
photoresist stripping
-- Fluorogard RS-T (Resist Stripping Thick) - PTFE membrane
filter for photoresist stripping and residue removal after
ashing
"With the unique filtration technology found in the new Fluorogard RS product line, Mykrolis significantly improves contamination control in both single-pass applications and recirculation systems used in photoresist stripping and residue removal," said Randy Broomhall-Dillard, product manager at Mykrolis. "Fluorogard RS filters enable us to offer our customers a more cost-effective solution, providing excellent performance in a compact footprint."
About Mykrolis
Mykrolis Corporation, based in Billerica, Massachusetts, is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit www.mykrolis.com.
Fluorogard and Mykrolis are trademarks of Mykrolis Corporation.