MOEMS Consortium Chooses Corning IntelliSense as Manufacturing Partner; Group to Develop Efficient Manufacturing of Micro-Opto-Electro-Mechanical Systems

    WILMINGTON, Mass.--March 10, 2003--Corning IntelliSense Corporation, a subsidiary of Corning Incorporated , announced today that it has been chosen to manufacture MOEMS (Micro-Opto-Electro-Mechanical Systems) devices by a consortium led by Xerox Corporation.
    The consortium, which also includes Microscan Systems, Inc., and Coventor, Inc., is part of a 14 million dollar five-year cost-shared NIST (National Institute of Standards and Technology) Advanced Technology Program formed in 1998. The focus of the consortium is the development of a robust, low-cost process for the efficient manufacture and rapid commercialization of MOEMS for use in telecommunications, imaging, medicine, entertainment, and information systems. Additional support for the project comes from the Cornell Nanofabrication Facility and the Rochester Institute of Technology's Semiconductor & Microsystems Fabrication Laboratory.
    "A key goal of the project is to investigate the MEMS process technology necessary to enable optical MEMS with extremely flat mirror surfaces," said Dr. Edwin Carlen, MEMS development engineer at Corning IntelliSense.
    "Xerox is making tremendous progress in addressing these issues and applying optical MEMS to a wide variety of applications. We look forward to working with them and assisting with this program," added Christos Monovoukas, director of business development, Corning IntelliSense.
    "We needed a MEMS manufacturing partner who could quickly develop and implement a broadly enabling manufacturing process, and Corning IntelliSense, with their full-featured foundry and years of MEMS experience, was the obvious choice," commented Joel Kubby, manager, Xerox Microsystems Group, Xerox Wilson Center for Research & Technology.
    Some of the immediate commercial applications of this technology include MEMS optical bar code scanners and advanced laser printing systems.

    About Corning IntelliSense Corporation

    For more than a decade, Corning IntelliSense Corporation, a subsidiary of Corning Incorporated has supplied design, development, and volume manufacturing services as well as CAD for MEMS software. Corning IntelliSense develops and manufactures advanced MEMS devices for many sectors, including the optical, RF, laboratory equipment, and life sciences industries. Corning IntelliSense provides Total MEMS Solutions to customers today in eighteen countries. Corning IntelliSense's headquarters and manufacturing facility are located in Wilmington, Massachusetts, USA. More information about the company can be found at www.corningintellisense.com.