AMETEK Sets New Moisture Detection Standards For UHP Gas Systems

AMETEK Analyzer Sets New Moisture Detection Standards For UHP Gas Systems for the Semiconductor Industry

    Model 5910 UHP Moisture Analyzer Achieves Parts-Per-Trillion Detection

    PAOLI, Pa., July 17 The new Model 5910 UHP Moisture
Analyzer from AMETEK, Inc. represents the next generation in
moisture analysis for ultrahigh-purity (UHP) gases used by the semiconductor
industry.

    The Model 5910 analyzer sets new standards for baseline stability and
sensitivity with its ability to detect sub-part-per-billion changes in
moisture concentration, while providing one of the fastest response speeds
available.

    "The Model 5910 was developed as a significant enhancement of our highly
successful Model 5900 trace moisture analyzer that was introduced more than
five years ago and has since served as the industry standard for semiconductor
gas purity analysis," comments Tom Mangold, President, Electronic Instruments,
for AMETEK, Inc.

    "AMETEK's original objective for the Model 5910 was to achieve a factor of
5 improvement, or 1 part-per-billion (ppb) low detection limit, versus the
Model 5900," notes Mr. Mangold.  "The improvement in signal-to-noise ratio of
the Model 5910 over the 5900 is almost a factor of 50.  Based on the measured
noise characteristics of the 5910, this instrument will achieve a limit-of-
detection of less than 200 parts per trillion (ppt)."

    "As more semiconductor fabrication plants are constructed with 1ppb
moisture impurity specifications, the Model 5910 analyzer fills the need for
sub-part-per billion analysis at far lower cost than alternative technologies.
While most technologies take hours or days to respond to changes in ppbv
moisture concentration, the Model 5910 provides a quantum leap in performance
with a speed of response that's measured in minutes," he adds.

    At the heart of the Model 5910 analyzer is a quartz-crystal microbalance
(QCM) sensor and sampling system developed by AMETEK specifically for highly
accurate moisture measurements.  It also uses all welded, electro-polished,
UHP components that are selected and designed for the most accurate moisture
analysis possible.  The Model 5910 is one of a family of exceptional trace
moisture analyzers from AMETEK, a leader in process instruments.